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内容简介
版权页
Foreword
Preface
Acknowledgment
Content
Chapter1 Introduction
1.1 The Need for Parasitic Extraction
1.2 The Methods for RC Extraction and Field Solver
1.3 Book Outline
1.4 Summary
Chapter2 Basic Field-Solver Techniques for RC Extraction
2.1 Problem Formulation
2.2 Overview of the Numerical Methods
2.3 Indirect Boundary Element Method
2.4 Direct Boundary Element Method
2.5 Floating Random Walk Method
2.6 Summary
Chapter3 Fast Boundary Element Methods for CapacitanceExtraction (Ⅰ)
3.1 Basics of Indirect Boundary Element Methods
3.2 Fast Multipole Methods
3.2.1 Introduction
3.2.2 Multipole Expansions
3.2.3 Local Expansions
3.2.4 Fast Multipole Algorithm
3.3 Low-Rank Matrix Compression-Based Fast Iterative Solvers
3.3.1 Why Compression?
3.3.2 Matrix Compression Can Reduce the Complexity to Linear
3.3.3 Compression Possible?
3.3.4 Basics of Matrix Compression Using SVD and QR
3.3.5 Compression Without Building Entire Matrix Beforehand
3.4 Matrix Compression by Adaptive Cross Approximation
3.4.1 Adaptive Cross Approximation (ACA)
3.4.2 Recompression of Adaptive Cross Approximation
3.5 Summary
Chapter4 Fast Boundary Element Methods for Capacitance Extraction (Ⅱ)
4.1 Direct Boundary Element Method for Multi-dielectric Capacitance Extraction
4.2 The Quasi-multiple Medium Approach
4.2.1 Basic Idea
4.2.2 Decomposition of Dielectrics and Boundary Element Partition
4.2.3 Algorithm Description and Analysis
4.3 Equation Organization and Solving Techniques
4.3.1 Organization of the Coefficient Matrix
4.3.2 Extended Jacobi and MN Preconditioners
4.4 Numerical Results
4.4.1 The Comparison with GIMEI
4.4.2 The Comparison with ODDM
4.4.3 The Results for Structures from Real Design
4.4.4 The Comparison with FastCap
4.5 Efficient Techniques for Handling Floating Metal Fills
4.5.1 Basic Idea
4.5.2 Equation Formation and Solution
4.5.3 Numerical Results
4.6 Summary
Chapter5 Resistance Extraction of Complex 3-D Interconnects
5.1 Analytical Resistance Formulation
5.2 Field Solver for Interconnect Resistance
5.2.1 Resistance Network of Multiterminal Regions
5.2.2 Resistance Calculation Using Direct BEM
5.3 Fast BEM Solver Using Linear Boundary Elements
5.3.1 Physics-Based Nonuniform Virtual Cutting
5.3.2 Discarding Conductors Not in the Path of Direct Current
5.3.3 Dividing Elements Only in One Direction When Possible
5.3.4 Linear Boundary Elements for Straight Conductors
5.3.5 Efficiency Summary
5.4 Analytical QBEM Extraction
5.4.1 General Analytical QBEM Algorithm
5.4.2 Distinguish Between Regular and Irregular Subregions
5.4.3 Compute the Resistance Network of the Whole Region
5.4.4 Numerical Result and Analysis
5.5 Summary
Appendix 5.A
Chapter6 Substrate Resistance Extraction with Boundary Element Method
6.1 Field Solver for Substrate Resistance
6.2 Efficient Field-Solver Techniques
6.2.1 NonuniformMeshing
6.2.2 Numerical Reduction of Linear Equation System
6.2.3 Quasi-multiple Medium Technique to Sparsify Matrix
6.3 Numerical Experiments
6.3.1 Simple One-Layer Substrate
6.3.2 The 52-Contact Structure with Three Doping Profiles
6.3.3 Test Structure with Lateral Resistivity Variation
6.4 Summary
Chapter7 Extracting Frequency-Dependent Substrate Parasitics
7.1 Field Solver for Substrate Capacitance and Resistance
7.2 Direct Boundary Element Method for Substrate Impedance Extraction
7.3 The Two-Step Approach
7.3.1 Frequency-Dependent Entries in Matrix A
7.3.2 Perturbed Equation System and Its Efficient Solution
7.4 Efficient Technique for Solving the Real-Valued System
7.5 Overall Algorithm Flow and Discussion
7.6 Numerical Results
7.6.1 Substrate with 52 Contacts
7.6.2 More Numerical Experiments
7.7 Summary
Chapter8 Process Variation-Aware Capacitance Extraction
8.1 Motivation
8.2 The Incremental BEM for Variation-Aware Capacitance Library Building
8.2.1 Basic Idea
8.2.2 Modification of the Coefficient Matrix and the Solving Technique
8.2.3 Numerical Results
8.3 Preliminaries of Variation-Aware Statistical Capacitance Extraction
8.3.1 Grid-Based Process Variation Model
8.3.2 The Hermite Polynomial Collocation Method
8.4 Chip-Level Statistical Capacitance Extraction Considering Spatial Correlation
8.4.1 Intra-window Capacitance Extraction with the Grid-Based Variation Model
8.4.2 Calculation of Inter-window Capacitance Covariance
8.4.3 Complexity Analysis of the Inter-window Calculation
8.4.4 Statistical Model of Full-Path Capacitance
8.5 Experiments of Statistical Capacitance Extraction
8.5.1 Simple Cases with Parallel-Line Structure
8.5.2 A Large Case with Multilayered Structure
8.6 Summary
Appendix 8.A.Complete Proof of Theorem 8.3
Chapter9 Statistical Capacitance Extraction Based on Continuous-Surface Geometric Model
9.1 The Continuous-Surface Model for Geometric Variation
9.1.1 Three Geometric Variation Models
9.1.2 The Reasonable CSV Model for On-Chip Interconnect
9.1.3 The Comparison of Three Geometric Variation Models
9.2 Efficient Statistical Extraction Techniques
9.2.1 The Weighted PFA for Variable Reduction
9.2.2 Parallel Statistical Capacitance Extraction
9.2.3 Calculating the Inter-window Covariance of Capacitance
9.3 Fast Approaches to Model the Line-Edge Roughness
9.3.1 Background
9.3.2 The Adjoint Field Technique for Sensitivity Calculation
9.3.3 Two Efficient Approaches
9.3.4 Numerical Results
9.3.5 More Analysis Results and Discussion
9.4 Summary
Chapter10 Fast Floating Random Walk Method for Capacitance Extraction
10.1 The Basic Floating Random Walk Algorithms
10.1.1 Numerical Technique to Calculate Multi-dielectricSurface Green's Function
10.2 A Multi-dielectric FRW Algorithm with the Precharacterized Probabilities and Weight Values
10.2.1 The Basic Idea
10.2.2 The Details of the Precharacterization Procedure
10.2.3 The FRW Algorithm with Multi-dielectric GFTs and WVTs
10.3 The Techniques for Variance Reduction
10.3.1 Background
10.3.2 The Importance Sampling with the Weight Values Averaged
10.3.3 The Comprehensive Variance Reduction Scheme
10.4 The Space Management Technique and Parallel Implementation
10.4.1 The Space Management Technique
10.4.2 The Parallel Implementation
10.5 Numerical Results
10.5.1 Test Cases
10.5.2 Validating the Multi-dielectric FRW Algorithm
10.5.3 Validating the Variance Reduction Techniques
10.5.4 Comparing with the Fast Boundary Element Method
10.5.5 Validating the Efficiency of Parallel Computing
10.6 Summary
Chapter11 FRW-Based Solver for Chip-Scale Large Structures
11.1 Motivation
11.2 Basic Operations of Space Management and Accelerating Techniques
11.2.1 Basic Operations
11.2.2 Improving the Candidate Checking with Distance Limit
11.2.3 Incomplete Candidate List
11.2.4 Reducing the Time for Inquiring the Candidate List
11.3 Space Management Structures and Approaches
11.3.1 The Improved Octree-Based Approach
11.3.2 Two Grid-Based Approaches
11.3.3 The Hybrid Approach Using Grid and Octree
11.4 Numerical Results
11.4.1 Test Cases
11.4.2 Validating the Three Accelerating Techniques
11.4.3 Evaluating Different Space Management Approaches
11.4.4 RWCap2 with the Hybrid Approach Using Grid and Octree
11.4.5 The Results for Multi-dielectric Cases
11.5 Summary
References
Index
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